| 摘要 |
PURPOSE:To prevent the intrusion of oxygen from the boundary face of magnetic films and to eliminate the change of the magnetical properties of a photomagnetic recording medium with lapse of time by inactivating the boundary layer of the magnetic films. CONSTITUTION:A cleaned and dried glass substrate 17 is attached to a substrate electrode 16. Gaseous N2 is ionized by a plasma generating chamber 6 and the ionized N<+> ions are accelerated and beam-shaped in an electrostatic accelerator 8 operated by a high-voltage power source 7. The N<+> ion beam is selectively emitted toward the direction of an X-Y scanning plate 11 by a mass spectrometer 9. Shutters 15 and 18 are opened to deposit a vertically magnetizable GbTbFe film on the glass substrate 17 when preliminary sputtering is executed for a substantially long period. A vertically magnetizable GdTbFe film layer 1, a vertically magnetizable GdTbFeN film layer 2 and a glass substrate 3 are shown in the sectional view of the required part of the GdTbFe photomagnetic recording medium incorporated with nitrogen into the boundary layer.
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