| 摘要 |
PURPOSE:To readily form a photowave guide line on an electric circuit by using as a waveguide line material dielectric multilayer structure, thereby eliminating an electric separation between elements. CONSTITUTION:Laser lights emitted from lasers 2, 3, 4, 5, 6, 9, 10 of electro- optical converters in response to electric signals are guided through a photowaveguide line (SiOx clad layers 18, 20, and an SiNx photowaveguide layer 19) of dielectric multilayer structure and again converted by photodiodes 2, 7, 8, 10, 11 of opto-electrical converters into electric signals. At this time, even if electric circuits of Schottky type FETs 13-16 exist on the lower side of the photowaveguide line, there is no problem due to an electric insulation. Thus, the separation of elements is facilitated to be readily integrated.
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