| 摘要 |
PURPOSE:To attain miniaturization of the titled device and high-speed at the same time and to eliminate fogs by separating a scanning mirror into a low-speed wide visual field scanning mirror performing low-speed scanning in wide visual field and a high-speed narrow visual field scanning mirror performing high-speed scanning in narrow visual field and arranging them at the locations respectively. CONSTITUTION:The low-speed wide visual field scanning mirror 3a scanning horizontally a measured face 4 in the direction of arrow A-A' while being vibrated in the direction of arrow B-B' around a vertical axis 01 and the high-speed narrow visual field scanning mirror 3b reflecting again an infrared ray 5 made incident via an infrared ray lens 2 and reflected on the low-speed wide visual field scanning mirror 3a are provided, and the high-speed narrow visual field scanning mirror 3b is vibrated in the direction of arrow C'-C with a inclination vertical to this paper around an axis 3b'. One line of the measured face 4 in the vertical direction is scanned by vibrating the scanning mirror 3b for a half cycle toward the arrow C-C' and the scanning mirror 3a moved to the adjacent scanning line in the arrow B or B' during this time. The scanning mirror 3b is arranged on a video image face giving no functional hindrance even with a small mirror face. |
