| 摘要 |
PURPOSE:To improve mass productivity and reproducibility by superposing semi-hermetic baking boats, into which solar cell substrates on which CdTe is applied are introduced, and baking the substrates. CONSTITUTION:When semi-hermetic baking boats 10, 10', into which solar cell substrates on which CdTe is applied are admitted, are superposed and the substrates are baked, projections 9 for spacers are fitted between the upper and lower boats 10, 10', a clearance is formed, and the substrates are baked. Consequently, cadmium chloride as a flux also generated from the substrate in the baking boat at the lower step side 10' can be evaporated smoothly. Accordingly, completely the same characteristics as CdTe baking films on the upper step side are acquired, thus further improving mass productivity. |
