| 摘要 |
PURPOSE:To enable to perform the communication of data which can not be inputted or outputted automatically by a semiconductor manufacturing device as well as to enable to flexibly perform a precise control on a semiconductor process by a method wherein a data output device and a data input device are added. CONSTITUTION:The data which can not be inputted or outputted automatically from a semiconductor manufacturing device 2 to a higher order computer 1 can be communicated by adding a data output device 3 and a data input device 4. As a lamp lighting device 6 is formed independently from the semiconductor manufacturing device 2, it can not be controlled automatically. In this case, the operator reads out the outputted data by outputting the power value to be given to the lamp to the data outputting device 3 from the higher order computer 1, and the lamp lighting device 6 can be adjusted. |
