| 摘要 |
PURPOSE:To lengthen life by alternately laminating discoid ceramics, which consist of the same material as a ceramic pipe and have a thermal expansion coefficient comparatively close to said material, and ring-shaped ceramic spacers into the ceramic pipe at every plural number. CONSTITUTION:A laser small tube section in which discoid ceramics 2, centers thereof have holes for the small tube, and ring-shaped ceramics 3 for mutual insulation are laminated alternately into a pipy ceramics 1 at every large number is formed, an airtight section is constituted by encapsulating pans 6, 6' made of a metal, glass vessels 7, 7' and Brewster windows 9, 9', and an anode 5 is brazed to the pipy ceramics 1 through an intermediate metallic cylinder 10. A cathode 4 is arranged while being opposed to the ceramics 2 and being held by a H introducing bar 11 and a K introducing bar 12. The ceramics 2 have the holes 20 at central sections constituting the small tube and holes 21, 21' for gas return paths, and the holes for the return paths are constituted so as not to be continuously opposed. A material having high thermal conductivity and large strength at a high temperature such as beryllia silicon carbide is employed as the ceramics 2. Ceramics can improve the accuracy of parts, and the small tube sections are not continued, thus lengthening life without the deposition of worn foreign matters. |
