PRODUCTION OF MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To obtain the titled recording medium having excellent durability with excellent productivity by carrying out reactive sputtering of silicon by oxygen in such a way as to prevent the oxidation of the surface of a target. CONSTITUTION:A vertical magnetic film 32 of Co-Cr is formed on a polyimide film as the substrate 31 having 50mum thickness by a magnetron sputtering method. A silicon oxide layer 33 is further formed thereon in 200Angstrom thickness by using silicon as the target with a reactive magnetron sputtering method wherein oxygen is introduced. When a head is attached with the recording medium, the deterioration of the signal output is not recognized after 6 million passes, whereas the signal output ordinarily deteriorates after 3 million passes.