| 摘要 |
PURPOSE:To enable the application in a wide temperature range, by forming a pressure receiving element and a temperature compensation element from an electrostrictive element having the same temperature coefficient to elevate the stability of the output with respect to changes in the ambient temperature. CONSTITUTION:A pressure receiving element 1 comprises an electrostrictive element having an electrostrictive effect. A temperature compensation element 2 has the same temperature characteristic with the same material and construction as the pressure receiving element 1. On the other hand, the pressure receiving element 1 and the compensation element 2 are mounted by an adhesive material or the like facing each other sandwitching a case 5 and one electrode is drawn out in common with a lead pin 4-2 through the case 5. Moreover, an insulation seal material 6 maintains electric insulation of the lead pin 4-1 and the case 5 to ensure a better density. Then, the pressure is detected depending on the changes in the electrostatic capacitance of the pressure receiving element 1. This can elevate the stability of the output significantly against variations in the ambient temperature thereby enabling the application in a wide temperature range. |
