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发明名称
ZUECHTUNGSSCHIFFCHEN FUER DIE FLUESSIGPHASENEPITAXIE
摘要
申请公布号
DD238075(A1)
申请公布日期
1986.08.06
申请号
DD19850277172
申请日期
1985.06.10
申请人
ADW DER DDR ZI F. OPTIK UND,SPEKTROSKOPIE,,,DD
发明人
WAGNER,GUENTER,DD;BACHERT,HANSJUERGEN,DD;RUDOLPH,EBERHARD,DD;GOTTSCHALCK,VOLKER,DD
分类号
C30B19/06;H01L21/208;(IPC1-7):C30B19/06
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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