发明名称 |
PHOSPHO-BORO-SILANOL INTERLAYER DIELECTRIC FILMS AND THEIR PREPARATION |
摘要 |
<p>There are disclosed certain categories of novel spin-coating compositions comprising phosphorus-doped and/or boron-doped silsesquioxane oligomers. Cured interlayer dielectric films prepared therefrom have a superior combination of defined properties, particularly including adhesion (of single-coat and multiple coats) and/or resistance against degradation at temperatures above 500 DEG C. The spin-coating compositions are prepared in a critical manner from critical raw materials.</p> |
申请公布号 |
IL78383(D0) |
申请公布日期 |
1986.07.31 |
申请号 |
IL19860078383 |
申请日期 |
1986.03.31 |
申请人 |
STAUFFER CHEMICAL COMPANY |
发明人 |
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分类号 |
C09D183/04;C08G77/48;C08G77/56;H01B3/46;H01L21/312;(IPC1-7):C08J/ |
主分类号 |
C09D183/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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