| 摘要 |
PURPOSE:To prevent the error of housing a wafer carrier in an erroneous direction by providing a projected member which controls the housing direction of the wafer carrier corresponding to the asymmetric part of the wafer carrier inside a wafer transfer box. CONSTITUTION:A projected member 10 is not an obstacle to make the position of a wafer carrier 6 within a distance l2 in the case of properly housed but if the front and the back surfaces are inversely housed, the wafer carrier 6 is raised because the distance l2 is shorter. If the wafer carrier 6 is housed in the proper direction, the projected member 11 is positioned at the cut out part of the corner 9-2 of a surface H. The projected member 12 is provided at the side of the inside of a wafer transfer box and if the wafer carrier 6 is housed in the direction 90 deg. turned from the proper direction, the skirt of the front surface ( U surface) plate 7 collides and the wafer carrier 6 is raised. |
