| 摘要 |
PURPOSE:To ionize a discharge space uniformly for obtaining a stable laser output without exciting laser gas, by providing vacuum gaps as preionizing gaps so that the laser gas is preionized by X-rays produced therein. CONSTITUTION:A plurality of principal discharging capacitors C2 are connected on both sides between an anode 1 and a cathode 2. Vacuum gaps 3a-3e are also provided. Charging capacitors C1 are charged with a high voltage power by a DC high voltage +HV through a charging resistance R while they are grounded with reactors L. When a switch S1 is closed, the charge stored in the charging capacitors C1 is supplied to the principal discharging capacitors C2 to charge the same, and arc discharge is caused to occur in the vacuum gaps 3, producing X-rays. The X-rays preionize the laser gas present in the discharge space between the anode 1 and the cathode 2. When the charging voltage of the principal discharging capacitors C2 reaches a self-destroying voltage of the anode 1 and the cathode 2, electric discharge is started between the electrodes to excite the laser gas. Thus, a laser output 6 can be obtained. |
