| 摘要 |
PURPOSE:To prevent the cracking of a wafer by forming a wafer holder of pins which contact with the wafer at the two points of the bottom end of the wafer and pins of which the center is below the horizontal line running the center of the wafer and which face the wafer via a small spacing. CONSTITUTION:A pair of the 1st positioning pins 3 are pressed to the two points on the bottom end side of the wafer 2. Two pan head screws 40, i.e., the 2nd positioning pins of which the center is positioned below the horizontal line running the center of the wafer 2 are provided. The screws 40 are positioned to face the wafer 2 in such a manner that the outside circumference of the stem part 40a and the side face of the head part 40b are spaced from the wafer at small spacings l1, l2. The wafer 2 is displaced upward around the pins 3 (pan head screws) when the wafer expands on increasing of the temp. thereof during sputtering. The outside circumference of the wafer 2 is displaced upward without contacting strongly with the stem part 40a of the screws 40. Since the outside circumference of the wafer 2 is spaced from the stem part 40a, the taking-out of the wafer 2 is easy.
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