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发明名称
MARKING FOR AUTOMATIC POSITIONING OF SEMICONDUCTOR CARRIER AS WELL AS METHOD FOR MAKING THEREOF
摘要
申请公布号
HU189741(B)
申请公布日期
1986.07.28
申请号
HU19830003079
申请日期
1983.09.02
申请人
VEB ZENTRUM FUER FORSCHUNG UND TECHNOLOGIE MIKROELEKTRONIK,DD
发明人
WESTPHAL,PETER,DD;BEYER,CHRISTIAN,DD;ANDRITZKE,LOTHAR,DD;PROFF,RAINER,DD;WALDMANN,GEORG,DD
分类号
H01L21/306;H01L21/308;H01L21/31;H01L21/465;H01L21/68;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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