| 摘要 |
PURPOSE:To form an insulation protection film without using a mask by arranging a piezoelectric device where a zinc oxide piezoelectric crystal film and an electrode are formed sequentially on the surface of a conductive vibrator substrate whose surface is formed as a projected shape while the surface is grounded to the device and forming an insulation protection film. CONSTITUTION:The conductive vibrator substrate 1 is curved in a projected shape, a piezoeectric crystal film 2 made of zinc oxide is formed to the project ed side surface and an electrode 3 is formed to the surface of the piezoelectric crystal film 2. The electrode 3 is made of Al or Ni and formed by the vacuum vapor deposition method. The projected face side of the piezoelectric resonator is grounded to the device side 4. In forming the insulation protection film by means of the thin film forming means in this state, the insulation protecting film 5 is formed to the rear side of the piezoelectric resonator, that is, the rear face (concaved face side) of the vibrator substrate 1 and body ends of the electrode 3 at the surface side when viewing the side face from the rear face. |
