| 摘要 |
PURPOSE:To simplify the constitution of a titled device, and also to increase its response speed by connecting plural solenoid opening and closing valves for receiving a digital control signal, in parallel to a flow passage. CONSTITUTION:A flow rate of a fluid which becomes a control object flowing between gates a-a' of a flow passage A is measured by a flow rate sensor 1 interposed in its flow passage A, and this flow rate measuring signal 2 is led to a comparing operation controller 3. It is brought to a comparing operation processing with a flow rate setting signal which is inputted separately by this comparing operation controller 3. On the other hand, to the flow passage A which becomes the other side of this flow rate sensor 1, plural solenoid opening and closing valves 6-13 which have an orifice having an appropriate flow rate coefficient, respectively are connected in parallel, to which a digital control signal 5 generated from the comparing operation controller 3 is led. The solenoid opening and closing valves 6-13 are set to a flow rate coefficient corresponding to a bit pattern of the digital control signal 5 of 8 bits, and control the flow rate. |
