发明名称 OPTICAL CVD APPARATUS
摘要 PURPOSE:To accelerate the growth speed of a membrane on a substrate, by placing a light source at one of two focal points of a reflector, wherein a part of the inner surface thereof is the surface of an oval body or oval column, while placing a reaction tank pervious to light at the other focal point so as to position the substrate in said reaction tank at said focal point. CONSTITUTION:A stainless steel plate or aluminum plate is processed so as to have an almost oval columnar surface and a metal such as aluminum having good reflectivity to short wavelength light is applied to the inner surface thereof by plating to fabricate a reflector 11. In this oval column, a light source 13 is arranged onto one of two focal axes and the substrate 5 placed in a reaction tank 12 is arranged onto the other focal axes. Because light is incident toward one point in the reaction tank 12 from all directions outside the reaction tank 12, if the diameter of the reaction is taken so as to be sufficiently made larger than that of the light source 13, large difference is generated between the intensity of light when light passes the wall of the reaction tank and that of light in the vicinity of a focal point and large difference is generated between the growth speed of a membrane on the substrate and that on the wall of the reaction tank.
申请公布号 JPS61164640(A) 申请公布日期 1986.07.25
申请号 JP19850006588 申请日期 1985.01.17
申请人 FUJI ELECTRIC CO LTD 发明人 ICHIKAWA YUKIMI
分类号 G02B5/10;B01J19/12;F21V7/08;G03G5/08 主分类号 G02B5/10
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