发明名称 DEVICE FOR PREPARING SINGLE CRYSTAL HEATED WITH CONVERGENT INFRARED RAY
摘要 PURPOSE:To enable picture processing by forming superior picture image freed of stray light and to control crystal growth automatically by forming a picture image of melting zone in the course of crystal growth in a telecamera provided with a reflectionless plate. CONSTITUTION:After setting a raw material bar 4 to an upper shaft 8 of a single crystal prepg. device by heating with convergent infrared rays, and a seed crystal 6 to a lower shaft 7, power is fed to a halogen lamp 11, and the light of the lamp 11 is converged to the central part of a quartz tube 9 by a mirror 3 of ellipsoid of revolution. A melting zone 5 is formed by allowing the tip end of the raw material bar 4 to contact with the tip end of the seed crystal 6 in the molten state. The shafts 7, 8 are revolved in the same or reverse direction and moved simultaneously toward below. Thus, a crystal is grown. On one hand, the condition of the light converged part is imaged with a superior contrast of the image of the melting zone 5 in a telecamera from a hole in the mirror 3 through a lens 10, reflecting mirror, etc. after removing the stray light by a black-dyed conical reflectionless plate 1 attached to a symmetrical position to the hole interposing an attaching bed 2. Thus, the picture processing is enabled and the crystal growth is controlled automatically while monitoring the processed picture image.
申请公布号 JPS61163185(A) 申请公布日期 1986.07.23
申请号 JP19850005376 申请日期 1985.01.16
申请人 SEIKO EPSON CORP 发明人 KATO EIJI
分类号 C30B13/24;C30B13/30;H01L21/208 主分类号 C30B13/24
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