| 摘要 |
PURPOSE:To enable detection an oxygen gas at a sufficient sensitivity at the normal temperature, by utilizing the phenomenon that a transition metal oxide reduced electrochemically changes to the original oxide by an oxygen gas. CONSTITUTION:Gold 50Angstrom thick is evaporated on a insulation substrate 1 made of ceramics, glass or the like to form a third electrode 2. A layer 3 of a solid electrolyte or a dielectric is provided on the electrode, teeth-like electrodes 4 and 5 comprising a nickel-chrome alloy are provided thereon 3 and a layer 6 of a transition meal oxide is formed thereon. In this example, the layer 3 employs SiO2 evaporated at the thickness of 5,000Angstrom and the layer 6 WO3 evaporated at the thickness of 3,000Angstrom . The dimensions of a electron element shall be 3mm wide, 4mm long and 1mm thick. Requiring no heating, this detection element can lower the power consumption while facilitating the integration with an attached electronic circuit as having no rise in the temperature. |
