| 摘要 |
PURPOSE:To compensate the nonlinearity to the temperature and pressure of a pressure sensor on a high level by providing a temperature sensor which measures the temperature of the pressure sensor, an A/D converting circuit, and an arithmetic circuit which performs arithmetic operation according to a specific equation. CONSTITUTION:The nonlinearity to the temperature T and pressure P of the semiconductor pressure sensor is expressed with sufficient precision even when the applied pressure P of the pressure sensor is represented as an equation of degree (n) containing the temperature T and a sensor output V without division and square-root arithmetic operation which require a long operation time. For the purpose, floating-point arithmetic integrated circuits dedicated to addition, subtraction, and multiplication which are short in operation time are used to constitute pressure sensor, the A/D converting circuit which digitizes the analog output signal of the temperature sensor for the temperature of the pressure sensor, and the arithmetic circuit which calculates the output P of the pressure sensor P based upon the output signal V of the A/D converting circuit and the temperature signal T from the equation (m and n: integer, ai: constant), thereby compensating the nonlinearity to the temperature and pressure of the semiconductor pressure sensor. |
