| 摘要 |
PURPOSE:To improve the clearness of a picture image by a method wherein common electrodes are formed of shielding conductive film with windows on each individual electrode formed on the light incoming side. CONSTITUTION:Individual electrodes 1 are formed by means of vacuum- evaporating and patterning Al on an insulating substrate 4 such as glass plate. Then a P-type amorphous silicon carbide film, I and N-type amorphous Si film are provided by means of high frequency glow discharge on the individual electrodes 1 to form photoelectric conversion films 2 of PIN structure. Next the films 2 are coated with Cr film by magnetron sputtering process to form common electrodes 3 with photoincoming windows 6 directly above the individual electrodes 1. In such a constitution, any dim part at the boundary between bright and dark parts coming into the middle part of photoelectric conversion parts may be shielded by the common electrodes 3 to prevent any carrier from flowing into adjoining individual electrodes 1. |
