| 摘要 |
PURPOSE:To realize carrying out of processed wafer placed on a wafer chuck simultaneously with carrying in of unprocessed wafer by providing a centering hand and a centering hand driving part which puts a pressing part in vertical motion. CONSTITUTION:Unprocessed wafers 1a are carried into a wafer chuck 8, while processed wafers 1b are carried out from the wafer chuck 8. A centering hand 2 has centering fingers 2a which hold the wafers 1a successively one by one between them. An arm pushing bar 3, placed in contact with the end part 9 of a wafer push-up arm 87, is supported by means of an arm pushing bar support part 4 through an elastic member. A centering hand driving part 5 puts the centering hand 2 and the arm pushing bar support part 4 in vertical motion. A centering hand support arm 6 supports the centering hand 2. A wafer conveyance finger 7 conveys wafers.
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