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发明名称
HOUSING VESSEL FOR NEGATIVE PLATE
摘要
申请公布号
JPS61152575(A)
申请公布日期
1986.07.11
申请号
JP19840265269
申请日期
1984.12.18
申请人
CANON INC
发明人
ITO HIROYUKI
分类号
H01L21/673;B65D25/54;B65D85/38;H01L21/02;H01L21/027
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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