| 摘要 |
PURPOSE:To provide a temp. variable cryostat capable of changing the temp. of an electronic element continuously from the temp. of a cooling medium to room temp., by linearily changing the temp. distribution in a test chamber by utilizing the heat conductivity of a support conductor. CONSTITUTION:When the temp. of a high temp. part is set by a heater 21, the heat of the heater 21 propagates through a support conductor 12 to enter a cooling medium container 8. The temp. of the lower part of the support conductor 12 at this time is the b.p. of a cooling medium 8 same to the temp. of the upper plate 9 of the cooling medium container 8 and the temp. of the upper part of the support conductor 12 same to that of the flange of a vacuum container 10. The temp. distribution of the support conductor 12 is one obtained by linearily connecting the temps. at the upper and lower parts of the support conductor 12. Because the temp. of helium gas in a specimen chamber becomes almost equal to the wall temp. of the support conductor 12, the temp. distribution in the specimen chamber 17 also linearily changes. Therefore, when the temp. of an article 1 to be measured is desired to be set to arbitrary temp., the height of the specimen chamber may be changed by driving a motor 4.
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