| 摘要 |
PURPOSE:To improve the yield of a product and to reduce the size of a device by disposing a cylindrical member around a work piece to form a hermetic chamber and communicating a vacuum device to the hermetic chamber. CONSTITUTION:Respectively hollow upper and lower frame bodies 9a, 9b are provided to upper and lower hot plates 8, 7 and both are connected by a bellows 9c having flexibility and airtightness. The work piece 10 is placed on the lower hot plate 7 and the upper hot plate 8 is lowered, then the hermetic chamber is formed of the cylindrical member 9 constituted of the upper and lower frame bodies 9a, 9b and the bellows 9c. The vacuum device 12 is driven to reduce the pressure in the hermetic chamber and a movable base frame 5 is lowered by a cylinder 6 to press the work piece 10 under heating. The air and moisture are efficiently removed and the smaller pressurizing force is required by the above-mentioned method. The yield of the product is thus improved and the device is made smaller in size. |
