| 摘要 |
PURPOSE:To improve accuracy of the focusing and to automate the focusing by projecting a marker on an object to be measured and conforming a focus of a marker image to a focus of a measuring point on the object to be measured. CONSTITUTION:An objective 2P of a microscope 2 is opposed to the object 1a to be measured and a TV camera 3 is provided at the position of an ocular. Further, a marker projector 4 to project the marker image is provided on the object 1a to be measured. In that case, the setting is made so that the distance between a projection film 5 of the marker projector 4 and the object 1a to be measured is equal to the distance between the object 1a to be measured and the photoelectric conversion face 3T of the TV camera. Thus, an image of the object 1a to be measured and the marker image are photodetected by the TV camera 3 and the distance between the objective 2P and the object 1a to be measured is adjusted so that the marker image is focused, by which the focus of the surface of the object to be measured on which the marker image is projected can also be adjusted. |
