| 摘要 |
PURPOSE:To enable a process tube and a boat loader to position correctly by means that the process tube is constituted to be adjustable as to position. CONSTITUTION:Plural process tubes 1 and a soft-landing type boat loader 2 are provided to a diffusion device. The process tube is provided at plural steps in up and down direction and each process tube 1 is supported by a bearing device 4 so as to be adjustable. A laterally moving stand 6 is moved in right and left direction by operating a feed screw mechanism 7 and is adjusted to position in right and left directions for the arm 15 of the process tube 1, then is adjusted to position of the process tube 1 in up and down directions by means that a left stand 10 is moved up and down by operating of a lifting mechanism 8, 9 in the same way. Additionally, since the front section and the rear section of the lift stand 10 is moved up and down separately by operating the lifting mechanism 8 and 9 separately, the center line inclination of the process tube 1 in forward and backward directions is adjustable. |
