| 摘要 |
PURPOSE:To obtain a manufacture method of a surface acoustic wave device in which aging process is finished in a short time by adopting discontinuous high temperature aging as the aging process. CONSTITUTION:The aging process for the surface acoustic wave device 8 is executed in an aging furnace according to the temperature schedule 11 shown in figure; high temperature for 12hr, room temperature for 12hr, high temperature for 12hr and room temperature again. The advantage of the aging process like this is that foreign materials in the element and other members in an air- tight package are made active once at 12hr leaving at a low temperature after the 1st 12hr high temperature aging, the decomposition of foreign material is finished in a short time by the 12hr high temperature aging thereby stabilizing quickly the characteristic. The characteristic of the device 8 processed by the temperature schedule 11 in figure is almost similar to that of a conventional 48hr continuous aging. |
