| 摘要 |
PURPOSE:To omit troublesome manual operation by deciding a control temperature to a required temperature distribution pattern, that is, setting value of an external temperature while taking inter-zone interference into account so as to attain quickly the required temperature distribution pattern in a furnace. CONSTITUTION:An external temperature signal from a temperature detecting element 4 of zones Z1-Zn of the furnace 1 is switched by a multiplexer 16 at each prescribed time, and after A/D conversion, the signal is stored in a storage device 20 via a bus 25 as an input value of an external temperature (x). An internal temperature measuring signal from an in-furnace temperature detector 31 is digitized similarly, then stored in the device 20 as an internal temperature (y). A temperature distribution pattern signal Pis is stored in the device 20 via the bus 25 from a changeover switch 34. A CPU19 sets an external temperature setting value Xir for calculating a transmission gain corresponding to the pattern Pis to a temperature setting element 40. Then operation signals 51-5n are generated to make the input value coincident with the setting value. The signals 51-5n are fed to operation sections 31-3n via D/A inverters 181-18n to control the control element 2. Then heat treatment of a processed object 6 is executed. |
