| 摘要 |
PURPOSE:To maintain stably high reflectivity for a long period of time by forming copper which acts as a total reflection film to >=2,000Angstrom film thickness on a transparent substrate via titanium of 5-50Angstrom film thickness. CONSTITUTION:The titanium film 2 and the copper film 1 thereon are formed on the glass substrate 3. Incident light 4 transmitted through the substrate 3 is totally reflected by the boundary face of the film 1 and is emitted as reflected light 5. The film thickness d2 of the film 2 is made 5-50Angstrom and the film thickness d1 of the film 1 is set at >=2,000Angstrom . The effect of increasing the adhesive strength of the film 1 is not obtd. if the film 2 is formed thinner than 5Angstrom and the reflectivity is decreased as a result of oxidation, etc. when the film 1 is made thinner than 2,000Angstrom . The reflectivity of the copper is thus effectively utilized and the adhesiveness to the substrate 3 is improved by the titanium film. Such total reflection film maintains stably the high reflectivity for a long period of time and has no dependency on wavelength and is therefore usable for various optical systems and is easily manufacturable as well.
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