| 摘要 |
PURPOSE:To reduce a mechanical treatment time by irradiating an electron beam in a spotted shape on a part to be worked, then by controlling so as to scan the electron beam on a working part. CONSTITUTION:An electron gun 7 is provided on the upper part of a work chamber 8, which is kept in the necessary vacuum state. The electron beam of the electron gun 7 is irradiated on the surface of the material for substrate with its setting on a work table 14 and with its condensing. In this case holes are made by vaporization on the parts to be worked of conductive materials 1, 2 and insulating material 3. The electron beam is again irradiated on the periphery of the holes after completion of the hole making and the electron beam is controlled by a control device 17 so as to perform circular movement around the hole. The molten pool of the conductive materials 1, 2 is formed for the solidification with cooling and the conductive materials 1, 2 can be electrically connected simply. The mechanical treatment time is thus reduced. |
