Electrical pressure transducer with monitored reference chamber

摘要

The transducer has a membrane which is deformable depending on pressure and carrying at least one sensor element. It seals a reference pressure chamber against a medium under pressure. A second membrane (25) seals the reference chamber (19) against a test pressure for leakage monitoring. The second membrane carries at least one monitoring sensor element (26a) which generates an indicating signal when a leak occurs in the reference chamber. The monitoring sensor and test chamber (27) are arranged within the reference chamber (19).