发明名称 SEMICONDUCTOR ASSEMBLY APPARATUS
摘要 PURPOSE:To enable pellets to be directly picked up from a wafer ring before bonding by providing a wafer ring supplier automatically exchanging the wafer ring located in the state that pellets formed by dicing a wafer keeps the positional relation present in dicing. CONSTITUTION:When pellets 10 capable of bonding run out during the action of picking up pellets 10 in a wafer ring 8 set at the pick-up position on the wafer ring supplier 7, this mechanism 7 is rapidly moved to the direction parallel with a chute 3. Other wafer rings 8 set in adjacency on the wafer ring supplier 7 are set at the pick-up position immediately under a pick-up arm 9, and the pick-up pellets 10 by the arm 9 and their carriage to the middle stage 11 can be continuously carried out without breakings, and bonding action by a bonding arm 12 is continuously carried out.
申请公布号 JPS61140146(A) 申请公布日期 1986.06.27
申请号 JP19840260772 申请日期 1984.12.12
申请人 AKITA DENSHI KK;HITACHI LTD 发明人 YOSHIDA HISASHI;FUJIWARA SHUNICHI;TANIMOTO MICHIO
分类号 H01L21/677;H01L21/00;H01L21/52;H01L21/67;H01L21/68 主分类号 H01L21/677
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