发明名称 |
SEMICONDUCTOR ASSEMBLY APPARATUS |
摘要 |
PURPOSE:To enable pellets to be directly picked up from a wafer ring before bonding by providing a wafer ring supplier automatically exchanging the wafer ring located in the state that pellets formed by dicing a wafer keeps the positional relation present in dicing. CONSTITUTION:When pellets 10 capable of bonding run out during the action of picking up pellets 10 in a wafer ring 8 set at the pick-up position on the wafer ring supplier 7, this mechanism 7 is rapidly moved to the direction parallel with a chute 3. Other wafer rings 8 set in adjacency on the wafer ring supplier 7 are set at the pick-up position immediately under a pick-up arm 9, and the pick-up pellets 10 by the arm 9 and their carriage to the middle stage 11 can be continuously carried out without breakings, and bonding action by a bonding arm 12 is continuously carried out. |
申请公布号 |
JPS61140146(A) |
申请公布日期 |
1986.06.27 |
申请号 |
JP19840260772 |
申请日期 |
1984.12.12 |
申请人 |
AKITA DENSHI KK;HITACHI LTD |
发明人 |
YOSHIDA HISASHI;FUJIWARA SHUNICHI;TANIMOTO MICHIO |
分类号 |
H01L21/677;H01L21/00;H01L21/52;H01L21/67;H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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