发明名称 INSPECTION INSTRUMENT
摘要 PURPOSE:To increase the reliability of the body to be inspected by performing a selection based on the inspection result of the body to be inspected and by continuing the inspection at the time when the inspection result and the selection result are coincided. CONSTITUTION:A start signal is fed from the control circuit 3a of a handle 3 by a line l1 by inserting the terminal of an IC4 into the prescribed connection terminal by transferring the body IC4 to be inspected to an inspection mechanism 12. The transfer of the inspection data is performed between the mechanism 12 and circuit 3a by the lines l2-l4 and the electrical property is measured. A completion signal is fed to the circuit 3a by the line l5 from the mechanism 12 after completion of the prescribed inspection and the circuit 3a performs the selection of the IC4 based on the inspection result, while the IC4 is transferred to a selection mechanism 13 by a transfer path 6. On the other hand the IC4 is contained in containing parts X-Z by classification by driving the mechanism 13 with the lines l6-l8 and a classification control circuit 14 by the circuit 3a. A detecting path D is made by light emitting elements 41-43 and detecting elements 51-53 between the transfer path 6 and containing part, detecting whether both results of the inspection and selection are coincided or not and in case of the coincidence the start signal is fed to the mechanism 12 and the inspection is continued.
申请公布号 JPS61138183(A) 申请公布日期 1986.06.25
申请号 JP19840259161 申请日期 1984.12.10
申请人 HITACHI LTD 发明人 NAKAMURA KOJI
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址