| 摘要 |
PURPOSE:To improve the accuracy of inspection by selecting specific bits to the pattern bits of the design data corresponding to the angle of the pattern to be inspected and subjecting the noticed bit to a binary coding process. CONSTITUTION:The design data 1 is constituted of many pieces of the pattern bits a... obtd. by dividing minutely the pattern. the bits ax1, ax2... as the pattern part and a11, a12... as the parts outside the pattern are respectively stored in a memory. The bit ax1 at the corner is noticed and a line L1 running on said bit and crossing diagonally the bit is assumed. The bits a11-a14 overlapping on the line L1 are selected and the prescribed logical calculation is executed by which the bit ax1 is removed from the pattern. The bit ax2a is then noticed and the line L2 running thereon is assumed. The bits a21-a24 are selected and similarly the logical calculation is made by which the bit ax2a is removed from the pattern. The number of the bits to be selected and line angle theta are thus adjusted by which optional rounding is made possible. |
