发明名称 |
Apparatus for producing single crystal |
摘要 |
An apparatus for producing a single crystal according to the CZ method, which comprises a closed container consisting of upper and lower halves and having a shaft for pulling up the single crystal, at least a part of which contacting with said vapor of the elements is made of a material containing an element of the same group of the periodic table as that of component elements of the single crystal, a gap between said shaft and the container and an opening between said upper and lower halves of the container being sealed with a sealing material, at least one reservoir positioned in the container for supplying vapor of a volatile component element of the single crystal, and a heating means provided around the container; wherein a hot zone of the apparatus including the container is made of a material which has an X-ray absorption coefficient not larger than 5 cm2/g, and said material of the hot zone has such thickness that X-ray transmittance through the whole hot zone is 10-6 or more so as to monitor the single crystal being pulled up by X-ray fluoroscopy.
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申请公布号 |
US4596700(A) |
申请公布日期 |
1986.06.24 |
申请号 |
US19840671080 |
申请日期 |
1984.11.13 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
TADA, KOHJI;TOSHIHIRO, KOTANI;NAKAGAWA, MASAHIRO |
分类号 |
C30B15/10;C30B15/26;C30B27/02;(IPC1-7):B01D9/00 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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