| 摘要 |
PURPOSE:To achieve improved sensitivity and accuracy of measurement by installing a secondary electron detector having a ring-like scintillator around an energy filter and detecting secondary electrons emitted in all directions. CONSTITUTION:The secondary-electron-detecting element of a surface potential measurement equipment for an electron beam tester is constituted by installing a semispherical blocking-electric-field-type energy filter 51, consisting of a lead- out grid 52 and a filter grid 53, over a sample 50 in such a manner as to locate it in the center and directing the inner high-voltage surface 11 of a secondary electron detector, consisting of a ring-like scintillator 10 and a photomultiplier tube, toward the filter grid 53. Because of the above structure, it is possible to detect all secondary electrons 58 passing through the potential barrier of the filter grid 53 after being emitted from the sample 50 in all directions. Consequently, both the sensitivity and the accuracy of measurement can be improved. |
