| 摘要 |
PURPOSE:To accurately form a fine pattern by forming a sublimate material in a film such as a metal film using a focusing ion beam and by sublimating it and eliminating it by a heat treatment. CONSTITUTION:A molybdenum metal film 2 is formed on a substrate 1. A focusing ion beam 5 by oxy ion is selectively irradiated to form a pattern on a metal film 2. And then, a molybdenum oxide 6 which is a subliminate material is formed on a position exposed to the beam 5. After a heat treatment, the oxide 6 subliminates and is eliminated, and a desired pattern is finely formed. |
