| 摘要 |
PURPOSE:To obtain quickly and easily a focused state, and to set an object to be inspected, to the desired position by supporting an object placing base on the slant face of a tapered base, and providing a driving mechanism for feeding the tapered base horizontally and in both right and left directions. CONSTITUTION:An object to be inspected 1 is placed on an object placing base 2, and a tapered base 13 supports a roller pin 12 of the object placing base 2, on a slant face. A driving part 15 consisting of a nut and a feed screw to be screwed to this nut is provided on the bottom face of the tapered base 13, and the feed screw is fixed t the shaft of a Z-axis driving motor 14. A joy stick 23 is provided in order to drive an X-axis use potentometer 23Y generate a driving command signal of magnitude being proportional to an inclination angle of the stick, and send it to an X axis driving circuit AX and a Y axis driving circuit AY. In this regard, a changeover switch 22 switches the output of the potentiometer 23 to the circuit AY and a Z-axis driving circuit AZ. In such a way, a focused state is obtained quickly and easily, and the object to be inspected can be set to a desired position. |
