| 摘要 |
PURPOSE:To enable the checking to ensure that a sample (containing transparent sample) is milled upto the required thickness, by irradiating electron beams emitted from an electron gun to detect the thickness thereof after milling. CONSTITUTION:A sample 2 is supported almost at the center of a vacuum chamber 1 and two ion guns 3 are set sandwitching the sample 2 to mill it from the surface and back thereof 2. An electron gun 4 and an anode 5 are provided above the sample 2 while Faraday gauge 6 is provided therebelow to detect the electron dose passing through the sample 2. Then, argon gas introduced into the ion gun 3 ionized and accelerated with an anode 7 to impinge on the surface of the sample 2 until the sample 2 is made into a thin film being gradually scrapped off by the ion beam. So, an electron beam from the electron gun 4 is transmitted through the sample 2 and the transmission electron dose is detected with the Faraday gauge 6. thus, the thickness of the sample 2 can be determined by previously examining the electron beam transmittance of main material. |
