| 摘要 |
PURPOSE:To directly mark the surface of a semiconductor element by memorizing the result of judgement of a semiconductor laser inputted to the processor, by a method wherein continuous measurement is enabled by controlling the result of judgement of measurement probes by input to a data processor. CONSTITUTION:An electrode holding plate 12 is provided on an inspection equipment 11 of semiconductor laser elements, and a vacuum chuck 13 is ar ranged on its surface at the position of arrangement of a semiconductor laser element 14. The element 14 is positioned with an L type stopper 15, and a measurement head 19 with a pair of a measurement probe 17 and a marking probe 18 for quality screening adjacent to it is arranged above the element 14. Further, a photo receptor 16 for laser light detection is arranged in front of the stopper 15. The result of measurement of the probe 17 is inputted the data processor 20, and continuous measurement is enabled by controlling the inspector. Then, the speed of chip screening and its accuracy are largely im proved by directly marking the surface of the element with quality judgement marks by means of the marking probe 18. |
