| 摘要 |
PURPOSE:To improve response performance and reduce dimension by forming a part of the inner wall of a fluid chamber in flat form from a piezoelectric substrate formed by arranging a plurality of driving electrodes in row from and transferring fluid in the driving direction by driving in multiphase the driving electrodes of the piezoelectric substrate in a prescribed direction successively. CONSTITUTION:A plurality of driving electrodes 2 are arranged in row from on one surface of a piezoelectric substrate 1, and a back plate 3 is superposed onto the piezoelectric substrate 1 through a spacer 4, and a fluid chamber R is formed between the piezoelectric substrate 1 and the back plate 3. When a driving signal phi is supplied from an input terminal, a distorted wave is generated in the vicinity of the surface of the piezoelectric substrate 1 so as to shift from an electrode 21 towards an electrode 221 according to the lapse of time. Therefore, fluid can be transferred from the electrode 21 towards the electrode 221 by adding fluid into the fluid chamber R. The direction of transfer can be reversed by changing the phase order of the driving signals. Therefore, a pump which is small-sized and has high response performance and can transfer liquid from one edge to the other by opening the both edges of the apparatus can be obtained. |
