| 摘要 |
PURPOSE:To attain stable pulseshaped glow discharge and a large discharge input in pulse-shaped oscillation having high frequehncy by dividing a glow discharge section along the direction of a lawer-beam axis by a plurality of heat-resistant insulating plates with openings, through which laer beams are passed. CONSTITUTION:Lenth l1 in the direction of the opical axis of a glow dicharge section is divided at int4rvals l2 by a plurality of partiion walls 12 consisting of a heat-resistant insulator, openings 13 for passing laser beams are formed to the partition walls 12, and the diameters (d) are set in the same size as the diamet4r of stops 11, 12. Partitions glow discharge 14 is built up simultaneously among anodes 2 and cathodes 3 on the application of pulse voltage, laser beams 9a in a resonator are amplified by glow discharge with a passage through a purality of openings 13 of laser beams 9a, and one part of laser beams 9 is extracted as a laser output 9. Accordinglyk, stable glow discharge is attained while laser beams having excellent forcusing characteristics are acquired. |
