| 摘要 |
The invention relates to a wear-resistant coating as protection against wear for tools and wearing parts, and to a method for preparing it. The object of the invention is to develop a wear-resistant coating which does not exhibit columnar growth and the coarse-grain formation associated therewith and which can be prepared at high deposition rates by a deposition process from the gas phase even under atmospheric pressure. This object is achieved according to the invention by means of a layer structure of the wear-resistant coating, in which a plurality of granularly grown layers which consist of a metal carbide, nitride or carbonitride and have identical chemical constituents and different microstructures, a thickness of an individual layer being </= 5 mu m, are arranged above one another up to a coating thickness of </= 50 mu m. In terms of the process, the object is achieved according to the invention by there being passed into the reactor, in addition to a metal halide, alternately at least two carbon-containing or nitrogen-containing compounds or mixtures of these compounds as carbon and/or nitrogen carriers.
|
| 申请人 |
VEB WERKZEUGKOMBINAT SCHMALKALDEN |
发明人 |
SCHOENHERR,MANFRED,DR.-ING.;SEIDLER,MANFRED,DR.RER.NAT.;LEONHARDT,ALBRECHT,DR.RER.NAT.;WOLF,ERICH,PROF.DR.SC.NAT.;BARTSCH,KARL,DR.RER.NAT.;SELBMANN,DIETER,DR.-ING.;ROESLER,ROLF,DIPL.-PHYS.;WEITZ,WOLFGANG;WESTPHAL,HARTMUT,DR.RER.NAT.;BEGER,ARNDT,DR.-ING. |
