| 摘要 |
PURPOSE:To form easily a fine thin film coil pattern with a high accuracy by constituting laminated coil forming surfaces so as to interpose a flat embedding insulating layer. CONSTITUTION:A lower magnetic pole layer 22 is formed on a nonmagnetic substrate 21, and the 1st resin insulating layer 24 and a conductive layer are coated, whereby two thin film coils 25a and 25b for pattern-forming the conductive layer are alternately laminated to form the 1st thin film coil constituting layer 23. Provided that a magnetic pole connection hole 23a is kept. Then after a connecting magnetic pole layer 26 is formed on the prescribed exposure part of the lower magnetic pole layer 22, the embedding insulating layer 27 is formed on the overall substrate 21. Continuously the upper surface of said layer 27 is wrapped, and the connecting magnetic pole layer 26 is smoothed in an exposed shape. After a gap layer 28 is formed on the prescribed area of the embedding insulating layer 27, the 2nd resin insulating layer 29 and the conductive layer are coated, and laminated and formed by a thin film coil 30 for pattern-forming a conductive layer. Then the 2nd thin film coil constituting layer 31 having a restained magnetic pole connection hole 31a is formed. After an upper magnetic pole layer 32 is formed on the gap layer 28, protective layer 33 is formed on the overall substrate 21. |
