MODULE CONTROL CHAMBER,申请号JP19840233506-传众专利搜索

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发明名称	MODULE CONTROL CHAMBER
摘要
申请公布号	JPS61112504(A)	申请公布日期	1986.05.30
申请号	JP19840233506	申请日期	1984.11.06
申请人	HITACHI LTD	发明人	ABE SHIGEKI;KAWAMOTO KIKUO;KOBAYASHI HIDEKAZU;NAGASE KATSUICHI
分类号	H02B1/20;H05K7/00	主分类号	H02B1/20
代理机构		代理人
主权项
地址

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