| 摘要 |
This invention relates to means for locating an ultra-precision positioning of a table, in which a rough moving of the table is made by a motor connected to the aforesaid means, while a minute moving thereof is done by a piezoelectric element mounted on a ball screw shaft to be driven by the motor, whereby an ultra-precision positioning of the table can be carried out smoothly. Accordingly, it is unnecessary to dispose a roughly moving table and a minutely moving table separately within a device.
|
