| 摘要 |
PURPOSE:In the production of silicon polycrystals by pyrolysis of gaseous silicon hydride on the red-heated core surface in metallic reactor, the temperature difference between the outerwall surface of the metallic reactor and the core is specified to increase the energy efficiency. CONSTITUTION:The reactor of a tightly sealed cylinder structure 1 is equipped a jacket covering almost all of the surfaces and the top and bottom are connected to the temperature regulator 3. The upper part of the reactor 1 is tightly closed with the jacketed cover 5 and 2 sets of electrodes are set through the cover 5. These electrodes are made so that water may flow through them and the ends are lined through Ta-made connectors 91, 92 with a core of high-purity silicon which has a couple of vertical parts and a horizotal part connecting the vertical parts 10. The gas introduced from the pipe 11 is pyrolyzed to form Si, which deposits on the core 10. At this time, a gas whose temperature is adjusted is fed from the controller 3 into the jackets 2, 4 to set the temperature of the outer wall of the vessel 1 to 100-450 deg.C and the temperature difference of 100-700 deg.C is maintained from the core 10.
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