FINE ADJUSTMENT APPARATUS OF SAMPLE FOR SCANNING TYPE ELECTRON MICROSCOPE

摘要

PURPOSE:To enhance vibration resistance for external vibration by forming a support member of sample through extension of a part of a hollow cylindrical body having a spheric fulcrum. CONSTITUTION:A part of spheric fulcrum 5 is extended for use as a support member of sample board 9. The sample board 9 is also supported by the plates 5a, 5b fixed to the spheric fulcrum 5 with screws. Thereby, since the sample 10 is supported by a part extended from the spheric fulcrum 5, not depending on thickness of the shaft 6, a supporting force can be increased without enlargement in diameter of shaft 6 and vibration resistance to external vibration can be increased.