| 摘要 |
PURPOSE:To obtain uniform point positions and point sizes without adjusting them for every probe card used for measuring electric characteristics of a semiconductor wafer, by providing an optical laser projector on the probe card so as to integrate the probe card with the device for pointing a defective semiconductor element. CONSTITUTION:A fiber 1' from a laser oscillator is attached by means of a plug 7 to an optical projector 1 which is fixed to a probe card 4 and in which point position and point size have been adjusted, and a defective semiconductor is pointed thereby. In this manner, the pointing operation can be performed uniformly without the need of adjusting point position or size. |
